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Micro-hotplate nanowires

Key words silicon micromachining, micro-hotplates, semiconductor, metal-oxide, field-effect, gas sensors, CMOS and SOI, nanowires, printing, polymeric, plastic. [Pg.220]

Materials other than Sn02 also exhibited good gas sensing performances. Ryu etal (2008) fabricated Iu203 nanowires by a laser ablation method. The nanowires were then sonicated in isopropanol to obtain a suspension, which was deposited onto micro-hotplates. When operating at 275 C, responses of... [Pg.250]

PET foils were used by McAlpine et al. (2007) as the substrate onto which nanotubes were deposited (see Section 6.7.1). The device showed itself to be suitable for measuring NO at room temperature. ZnO nanowires were grown on Pl-based micro-hotplates by Zappa et al. (2012). Zn was sputtered onto the substrate through a shadow mask and then oxidized for 12 hours... [Pg.254]


See other pages where Micro-hotplate nanowires is mentioned: [Pg.221]    [Pg.250]    [Pg.250]    [Pg.251]    [Pg.255]    [Pg.497]   
See also in sourсe #XX -- [ Pg.250 ]




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