Micro-bolometer

Modern bolometers are micro-machined from silicon. This type of bolometer is only a few micrometers in diameter and is usually placed in one arm of a Wheatstone bridge for measurements. The modem micro-bolometer has a fast response time and is particularly useful for detecting far-IR radiation (600-20 cm ). 

Some MEMS sensors or micro-opto devices like acceleration sensors, angular rate sensors, scanning-mirror laser projectors or p-bolometer array image sensors, to name a few, must be operated under high-vacuum conditions. WLP by means of high-vacuum wafer bonding is a key technology to enable low-cost, hermetically sealed devices. 

Bolometer 7 Gas flow sensor 7 Micro-hotplates 6 Molecular dynamics approach 4 Monte Carlo simulation 5 Photonic device 7 Room temperature 2-3 Temperature dependence 2 Thermal conductivity 1, 4 Thermal flow sensor 7 Thermally isolating substrate 5... 

IR spectroscopy is a valuable complementary technique to Raman spectroscopy. Synchrotron based IR micro-spectroscopy is a new technique that shows promising perspectives for studies of skin and human cells (28). At the Max-Lab synchrotron beam line in Lund, Sweden an IR microscope is now being installed (29). This instrument will allow IR-spectra to be recorded with a bolometer detector down to 50 cm (around 1,5 THz). In the R(v)-representation of the low-wavenumber Raman spectrum it is very difficult to quantify the amount of free water because the water band at 180 cm is weak compared to the protein hydrogen bond band at 110-120 cm" Hopefully the water band is relatively more intense in the IR spectrum allowing a detection of the free water at low concentrations. 

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