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O Reilly TB, Smith HI (2008) Linewidth uniformity in Lloyd s mirror interference lithography systems. J Vac Sci Technol B 26 2131... [Pg.31]

Lloyd s mirror An optical arrangement for producing interference fringes. A slit is illuminated by monochromatic light and placed close to a plane mirror. Interference occurs between direct light from the slit and light reflected from the mirror. It was first used by Humphrey Uoyd (1800-81) in 1834. [Pg.485]

See other pages where Lloyd mirror is mentioned: [Pg.947] [Pg.947] [Pg.223] [Pg.223] [Pg.223] [Pg.273] [Pg.274] [Pg.118] [Pg.8] [Pg.3]