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Lithographic Techniques An Introduction

One of the attractive ways to make such model structures is based on lithographic techniques. We devote the next section to two important lithographic fabrication model catalyst methods, namely, electron-beam lithography (EBL) and colloidal lithography (CL). Lithography can be defined as a patterning process whereby an initial pattern is designed as some type of dataset which is subsequently written on the surface of a substrate as an array or ordered [Pg.275]

2 The Surface Science Approach In Situ Vapor Deposition Methods [Pg.276]


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