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Laser end-point-detection system

The output trace from the laser end-point detection system for a typical resist development cycle is depicted in Figure 9. The temporal distance between maxima can be related to a change in resist thickness through Equation 11... [Pg.101]

Figure 8, Laser End-point Detection System. Light from the laser is reflected off of the resist-substrate and resist developer interfaces. The reflected light is collected on a photodiode, the output of which is monitored on a strip chart recorder as a function of time. The output of this device is provided in Figure 9. Figure 8, Laser End-point Detection System. Light from the laser is reflected off of the resist-substrate and resist developer interfaces. The reflected light is collected on a photodiode, the output of which is monitored on a strip chart recorder as a function of time. The output of this device is provided in Figure 9.
Figure 9. Output of the Laser End-point Detection System. Figure 9. Output of the Laser End-point Detection System.
The dissolution rates, R, of the resist films in the developer were measured using a laser end-point detection system. (O Figure 6 shows the output of the device for an ideal case. The change in film thickness between maxima (or minima) At is given by... [Pg.297]

See other pages where Laser end-point-detection system is mentioned: [Pg.100]    [Pg.340]    [Pg.209]    [Pg.100]    [Pg.340]    [Pg.209]    [Pg.311]    [Pg.369]    [Pg.3513]    [Pg.112]    [Pg.708]    [Pg.579]   
See also in sourсe #XX -- [ Pg.332 ]



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