Kinetics in Low-Pressure Cascade Arc Torch

In low-pressure cascade arc torch (LPCAT), the electrical power is applied in the cascade arc generator, in which only carrier gas, generally Ar, is activated to create luminous gas. The luminous gas created in the cascade arc generator is blown into the second expansion chamber, in which the monomer is introduced. Thus, the luminous gas of Ar neutrals primarily creates polymerizable species, and following these two steps should treat the deposition kinetics. Principles described in this chapter apply to each of the two steps. Details of deposition kinetics in LPCAT are described in Chapter 16. 

The characteristics of the deposition on the cathode surface (deposition E) and the deposition on the electrically floating surface placed in gas phase (deposition G) in LPCAT LCVD are compared as follows  

LPCAT Deposition on electrode surface (deposition E) Deposition on substrate in gas phase (deposition G) 

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