Interrelations Between Material Properties and Geometrical Structures

Furthermore, geometrical microstructuring techniques can also be classified according to the dimension of structures created. 1, 2, 2.5 and 3D structuring technologies are known (Fig. 4.4). 

2 Interrelations Between Material Properties and Geometrical Structures 

Isotropic materials, such as glasses, show the same response during a structuring process, for instance during etching, in all directions, which will not be the case for anisotropic materials, such as single crystal silicon or aligned 

PVD sputtering using a mask standard photo-structuring processes photo structuring with fs-lasers 

The structuring parameters illustrated in Fig. 4.5 are used to describe the geometry of structures, although not all of these parameters are relevant to all structuring technologies. 

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