Inductor high-frequency performance

Au, Cu, Al). The thickness of the line must be high enough (some microns) in order to limit the influence of the skin effect at high frequencies. If a second metal strip is required, in the case of an inductor under-pass, for example, a BCB layer is an appropriate candidate to perform the isolation. 

Capelle M, Billoue J, Poveda P, Gautier G (2012) RF performances of inductors integrated on localized p+ type porous silicon regions. Nanoscale Res Lett 7 523-529 Chong K, Xie Y (2005) Low capacitance and high isolation bond pas for high-frequency RFICs. IEEE Electr Dev Lett 26 746-748... 

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