Image log-slope

The logarithmic slope of the aerial image is typically called the log-slope, and it is a good metric of the quality of the latent image. It is customary to normalize the image log-slope hy multiplying it hy the nominal line width w of the feature to yield the normalized image log-slope (NILS) as... 

In other words, the LER decreases as the dose increases. Also, the LER has been determined to exhibit a reciprocal relationship with contrast and image log-slope i.e., a higher contrast image or an image with higher image log-slope has a lower... 

This equation shows how a gradient in aerial image intensity results in a solubility differential in the resist. The development rate contrast is maximized by a high resist contrast and a large log-slope of the aerial image. 

Figure 13. Dependence of the scaled surface area SSA on the projected triangle size TS on a logarithmic scale obtained from the three-dimensional AFM images of (a) Pt/polished AI2O3, (b) Pt/etched Ni, and (c) Pt/unpolished AI2O3 electrodes. The slope s means (d log SSA / d log TS). Reprinted from J.-Y. Go et al., A study on ionic diffusion...

Figure 7 demonstrates on a logarithmic scale the dependence of perimeter P on area A of the pores obtained from the binary TEM image of CAS30 in Figure 6b. The (log P - log A) plots obtained from the carbon specimen displayed two straight lines with different slopes that can be divided into region I and II, indicating multifractal geometiy of the carbon specimen. The individual surface fractal dimensions in regions I and II were determined from Eqs. (26) and (27) to be 2.08 + 0.018 and 2.72 + 0.046, respectively. The transition area Ab from region I to II were determined to be 108 nm2, which corresponds to the pore diameter of 12 nm based upon spherical pore shape.

To a first approximation, the noise level for the silicon vidicon is independent of the signal level. For repeated measurements of currents between 4 and 4,400 nA with the image dissector, a log-log plot of imprecision vs. signal is linear with a slope of 0.51 0.07 (30) confirming the expected shot-noise behavior. 

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