Hydrodynamics of ultrathin resist films

The dynamic model of thin-film instahilities has been described in detail elsewhere we briefly summarize the relevant facts here. For an ultrathin film of mean thickness, /iq 100 nm, with a gas above and a solid substrate beneath, the following is the appropriate film profile equation for film thickness h(x, i), assuming (i) a quadratic velocity profile, (ii) no-slip condition at the solid surface, and 

Kheshgi and L.E. Scriven, Dewetting Nucleation and growth of dry regions, Chem. Eng. Set 46, 519 (1991). 

Adamson and A.P. Gast, Physical Chemistry of Surfaces, 6th ed., John Wiley Sons, Hohoken, NJ (1997). 

Sharma and E. Ruckenstein, Dewetting of solids by the formation of holes in macroscopic liquid films, /. Colloid Interface Sci. 133, 358 (1989) G.l. Taylor and D.H. Michael, On making holes in a sheet of fluid, J. Fluid Mech. 58, 625 (1973). 

Such perturbations can be schematically described as modulations of the liquid free 

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