Holographic lithography

The optical scheme of holographic lithography is schematically illustrated in Fig. 4. The beam of the same laser system as used for DLW recording passes through a diffractive optical element (DOE), where it is spht into a set of diverging multiple beamlets by diffraction. The set of beamlets is subsequently colhmated by a lens, and passed through the transmission mask, which selects... 

Fig. 4 Schematic layout of the optical setup for holographic lithography using diffractive DOE, and phase control of the interfering beams. The callouts illustrate the selection of the beams using transmission mask, their incidence directions (top), and extended transverse spatial range of the interference region using tilted pulses produced by DOE (bottom)...

Kondo T, Juodkazis S, Mizeikis V, Misawa H, Matsuo S (2006) Holographic lithography of periodic two- and three-dimensional microstructm-es in photoresist SU-8. Opt Express 14(17) 7943-7953... 

Nole J, Holographic Lithography Needs No Mask , Laser Focus World, 1997 33 209-212. 

M. Campbell et al.. Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature, 404, 53, 2000. 

Ogai K, Kimura Y, Shimizu R et al (1995) Nanofabrication of grating and dot patterns by electron holographic lithography. Appl Phys Lett 66 1560-1562... 

D photonic crystals can be made by holographic lithography. Switchable photonic crystals ° can be made by electrically switchable Bragg gratings or holographic polymer dispersed LCs (Fl-PDLC). i... 

Saravanamuttu, K., Blanford, C.F., Sharp, D.N., Dedman, E.R., Turberfield, A.J., and Denning, R.G. (2003) Sol-gel organic-inorganic composites for 3-D holographic lithography of photonic crystals with submicron periodicity. Chem. Mater., 15, 2301-2304. 

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