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High-density plasma, HDP

Table 3. Typical parameter values for RF diode and high density plasma (HDP) reactors [6]. Table 3. Typical parameter values for RF diode and high density plasma (HDP) reactors [6].
Fig. 20. High density plasma (HDP) reactor configurations. Inductively coupled plasma (ICP) (a), helical resonator (b), electron cyclotron resonance (ECR) (c) and helicon (d) reactors. After [11]. Fig. 20. High density plasma (HDP) reactor configurations. Inductively coupled plasma (ICP) (a), helical resonator (b), electron cyclotron resonance (ECR) (c) and helicon (d) reactors. After [11].
HDP-CVD High density plasma chemical vapor deposition... [Pg.762]

See other pages where High-density plasma, HDP is mentioned: [Pg.350]    [Pg.273]    [Pg.273]    [Pg.224]    [Pg.519]    [Pg.350]    [Pg.273]    [Pg.273]    [Pg.224]    [Pg.519]    [Pg.246]    [Pg.240]    [Pg.289]    [Pg.263]    [Pg.520]    [Pg.545]    [Pg.542]   
See also in sourсe #XX -- [ Pg.224 , Pg.520 ]



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Plasmas: density

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