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Helium ion microscopy

Collision cascades require some minimum energy dependent on the primary ion and the substrate composition. Projectiles of sufficient mass are also required to ensure that the energy is dissipated within the substrate sufficiently close to the surface. As revealed through Relation 3.1, this explains why energetic Helium ions, for example, are not used in SIMS but are used in both Helium Ion Microscopy (HIM) and RBS in which sputtering is not desired. [Pg.53]


See other pages where Helium ion microscopy is mentioned: [Pg.86]    [Pg.328]    [Pg.150]   
See also in sourсe #XX -- [ Pg.86 ]




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