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Glow discharge system pressure

SYSTEM PRESSURE UNDER A GLOW DISCHARGE (WITHOUT PRESSURE CONTROL)... [Pg.241]

Fig. 7. Dependence of total pressure (a) and film growth rate (b) on glow discharge duration in a closed system (Q = 0 Pq = 0.5 torr I = 1.7 mA) (monomer CjF ). [after Poll et al. ]... Fig. 7. Dependence of total pressure (a) and film growth rate (b) on glow discharge duration in a closed system (Q = 0 Pq = 0.5 torr I = 1.7 mA) (monomer CjF ). [after Poll et al. ]...
Jenkins, G., Manz, A., Optical emission detection of liquid analytes using a micro-machined d.c. glow-discharge device at atmospheric pressure. Micro Total Analysis Systems, Proceedings 5th p714S Symposium, Monterey, CA, Oct. 21-25,2001, 349-350. [Pg.472]

The simplest approach for the deposition of ZnO films by sputtering is sketched in Fig. 5.1 A DC glow discharge is ignited between a cathode, which is a planar Zn target, and the anode, which is the chamber of the vacuum system. The system is pumped to a pressure of T0Pa and Ar and O2 are introduced into the system. [Pg.187]

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See also in sourсe #XX -- [ Pg.241 ]



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