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Glow discharge structure

In this article, we describe and summarize our studies on the structural, magnetic,and transport properties of buckytubes. In addition, we describe how a conventional arc discharge can be modified into a stable glow discharge for the efficient synthesis of well-aligned buckytubes. [Pg.111]

Figure 16 (Street et al., 1986) shows the typical sample structure, consisting of three layers of a-Si H. Results using this technique have been reported for samples grown by the rf glow discharge of silane and by rf sputtering (Shinar et al., 1989). The first layer is hydrogenated amorphous silicon, deposited under conditions that yield high quality films (i.e., deposition temperature of 230°C, low growth rate) and is typically two microns thick. Next a layer of approximately 1000 A is deposited, whereby... Figure 16 (Street et al., 1986) shows the typical sample structure, consisting of three layers of a-Si H. Results using this technique have been reported for samples grown by the rf glow discharge of silane and by rf sputtering (Shinar et al., 1989). The first layer is hydrogenated amorphous silicon, deposited under conditions that yield high quality films (i.e., deposition temperature of 230°C, low growth rate) and is typically two microns thick. Next a layer of approximately 1000 A is deposited, whereby...
H. A. Weakliem, Diagnostics of Silane Glow Discharges Using Probes and Mass Spectroscopy L. Gluttman, Relation between the Atomic and the Electronic Structures A. Chenevas-Paute, Experiment Determination of Structure 5. Minomura, Pressure Effects on the Local Atomic Structure D. Adler, Defects and Density of Localized States... [Pg.294]

Disulfur monoxide, S20, can be prepared, along with SO, by the reduction of S02 in a glow discharge or from the reaction of metal sulfides with SOCl2. In the vapour phase at low pressure it slowly decomposes to S and S02 but in condensed phases it polymerizes. Its structure is similar to that of S02 with an SSO bond angle of 1 180.39 43 The complex t(Ph2PCH2CH2PPh2)2Ir(S20)]Cl (9) has been prepared by the reaction shown in equation (l).41 The complex (9) is air stable and the IR spectrum shows only one v(S—O) at 1043 cm-1.41,44 The complex [Mo(S20)(S2CNEt2)2] has also been isolated in small yield.45... [Pg.636]

When alkylsilanes such as methylsilane, dimethylsilane, trimethylsilane, tetra-methylsilane, and hexamethyldisilane polymerize in a glow discharge, the stoichiometry, chemical structure, and properties of the resulting polymers generally depend on the discharge conditions (2, 8, 21, 22], Elemental compositions from XPS for plasma trimethylsilane polymers deposited under different... [Pg.465]

Silicon. The most widely studied and perhaps the best understood PECVD film is that of amorphous silicon (a-Si). Glow discharge a-Si is an alloy of silicon and hydrogen, with the hydrogen content ranging from 5 to 35 atom percent (atom %), depending upon the deposition conditions (temperature, rf power, rf frequency, etc.) and the resulting film structure. [Pg.433]


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