Glow discharge mass spectrometry principle

Secondary Neutral Mass Spectrometry and Glow Discharge Mass Spectrometry. SNMS and GDMS are group>ed together because of the close similarities in principle between them. In both techniques the surface to be analyzed is sputtered and the contribution to the sputtered flux of secondary neutrals is measured. They differ in the methods used to measure the secondary neutral flux. In GDMS, as in GDOS, atoms are sputtered... 

Mass-spectrometry principles and techniques have been employed in other kinds of surface studies in which sample atoms are sputtered by interaction with a laser beam or by RF glow discharges. These approaches are more highly specialized, but it should be clear that mass spectrometry is an important tool in surface chemistry. The student should compare SIMS and ISS with other surface analytical techniques such as ESCA, Auger spectroscopy, electron microprobe, and low-energy electron diffraction (see Chaps. 14 and 15). 

---