Gases and Gas Equipment

Gases are more mobile than solids and liquids in that they are already in the vaporized state, therefore, they disperse readily with little or no energy input. Various mechanisms, procedures and hardware exist to contain, use, and dispose of gaseous chemicals. An understanding of the physical and chemical properties of a gas is mandatory prior to its use. Also an appreciation of the components used to contain, control, use, and dispose of gases in a responsible manner, should be developed. 

This chapter presents toxicological, chemical, and physical property data on most of the gases commonly encountered in the semiconductor manufacturing environment. MSDS s should be consulted for information on firefighting, emergency response and first aid. Equipment assemblies to contain, control and use gases are also described as well as a description of 

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The Food and Drug Administration (FDA) regulates medical gases as drugs and certain compressed gases and gas equipment as medical devices. These regulations are in 21CFR201,207,210,211,801,807, and 820. 

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