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Fluidic Pressure Sensing

Flow sensors Flow measurement Fluidic pressure sensing... [Pg.708]

While microelectronics can be described as the fabrication of electrical components like transistors, diodes, resistors and capacitors on a semiconductor substrate, mostly silicon, MEMS and MOEMS are using the manufacturing technologies of microelectronics to fabricate mechanical and optical structures as well as sensing or actuating devices. Typical examples are pressure sensors, microphones, acceleration and angular-rate sensors, magnetic compasses, inkjet heads, micro-scanners, micro-fluidic devices, biosensors, etc., to name some. [Pg.474]


See other pages where Fluidic Pressure Sensing is mentioned: [Pg.720]    [Pg.720]    [Pg.209]    [Pg.539]    [Pg.26]    [Pg.529]    [Pg.31]    [Pg.2555]    [Pg.152]   
See also in sourсe #XX -- [ Pg.720 ]




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