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Film thickness vs. time

Fig. 3.7. Film thickness vs. time of film thinning at various film radii curve 1 - r = 0.05 mm curve 2 -... Fig. 3.7. Film thickness vs. time of film thinning at various film radii curve 1 - r = 0.05 mm curve 2 -...
Fig. 1. PBTMSS film thickness vs. time during RIE and SME at 20 mTorr 02- Bias A -350 V B -450 V C -550 V D sputter mode etch (SME) at 75 W. Fig. 1. PBTMSS film thickness vs. time during RIE and SME at 20 mTorr 02- Bias A -350 V B -450 V C -550 V D sputter mode etch (SME) at 75 W.
See other pages where Film thickness vs. time is mentioned: [Pg.166]   
See also in sourсe #XX -- [ Pg.162 , Pg.165 ]



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