Moisture measurement, hydrated aluminum oxide films

Sensing chemical species is a much more difficult task than the measurement of mechanical variables such as pressure, temperature, and flow, because in addition to requirements of accuracy, stability, and sensitivity, there is the requirement of specificity. In the search for chemically-specific interactions that an serve as the basis for a chemical sensor, investigators should be aware of a variety of possible sensor structures and transduction principles. This paper adresses one such structure, the charge-flow transistor, and its associated transductive principle, measurement of electrical surface impedance. The basic device and measurement are explained, and are then illustrated with data from moisture sensors based on thin films of hydrated aluminum oxide. Application of the technique to other sensing problems is discussed. 

Application to Moisture Measurement with Hydrated Aluminum Oxide Films... 

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