Fast-neutral-beam apparatus

This article describes recent advances in the experimental determination of electron impact ionization cross sections for silane (SiH4) its radicals, SiH. (x = 1 to 3) and the Si-organic molecules tetramethylsilane (TMS), Si(CH3)4 tetraethoxysilane (TEOS), Si(0-CH2-CH3)4 and hexamethyldisiloxane (HMDSO), (CH3)3-Si-0-Si-(CH3)3, which is one of the simplest siloxane compounds. These are model substances, and the results obtained for these species may be used in efforts to predict the ionization properties of other, more complex Si-organic molecules. The ionization cross sections of the stable compounds were measured using a high-resolution double-focusing mass spectrometer. The cross-section data for the radicals were obtained in a fast-neutral-beam apparatus. 

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