Fabrication of Supported Model Catalysts by Lithography

The lithographic approach to make model nanocatalysts has emerged in the wake of the microelectronic boom almost half a century ago. The continued 

Method Principle Advantage Disadvantage Recent progress 

Electron-beam Electron-sensitive Good control of Slow, residual Smaller hne width. 

Photolithography Photon-sensitive mask Parallel, fast, multi-component structures Large structures, residual chemicals New light sources 

Scanning probe techniques Tip manipulation Atomic-scale precision, no resist, solvents, etc. Very slow for single molecule control (serial) Parallel methods, micromachining 

---