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Fabrication of Planar Devices

Microfabrication technologies using photolithographic patterning processes (micromachining) were used first by Terry56,57 in 1975 for the integra- [Pg.259]

The sample is introduced into the separation channel by electromigration injection. Thus far, detection has been solely by laser-induced fluorescence, using an argon ion laser or a helium/neon laser as the excitation source and a photomultiplier tube (PMT) or charge-coupled device (CCD) [Pg.261]


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Device fabrication

Planar devices

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