Fabrication laser micro machining

W. Pfleging, W. Bemauer, T. Hanemann, M. Torge, Rapid fabrication of microcomponents - UV-laser assisted prototyping, laser micro-machining of mold inserts and replication via photomolding, Microsystem Technologies, 9, 67-74 (2002). 

A third way to build up pFCs based on MEMS-polymers such as poly-dimethylsiloxane (PDMS) or polymethyl methacrylate (PMMA) or PCB-materials such as polyimid (PI) or FR4. These polymers can be micro-machined by molding or by laser ablation. Shah et al. [22,23] have developed a complete PEMFC system consisting of a PDMS substrate with micro-flow channels upon which the MEA was vertically stacked. PDMS micro-reactors were fabricated by employing micro-molding with a dry etched silicon master. The PDMS spin coated on micro-machined Si was then cured and peeled off from the master. The MEA employed consisted in a Nafion - 12 membrane where they have sputtered Pt through a Mylar mask. Despite an interesting method, this FC gave poor results, a power density of 0.8 mW cm was achieved. 

The micro devices were fabricated from a polyethylene terephthalate (PET) substrate using 193 nm ArF excimer laser ablation [59], Microstructures produced in this way were thermally sealed by a lamination machine. 

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