Experimental Basis for Quantitative Control Parameters

The effect of preheating on growth modes and surface finishes can be explained by the nature and amount of intermediates through homogeneous reactions. If the precursor gases are not preheated, there are not enough active 

3 Influence of Temperature and Pressure on the Microstructure It is well established that three types of pyrocarbon can be obtained by CVD processes, namely smooth laminar (SL) structure, rough laminar (RL) structure and isotropic (ISO) structure pyrocarbon. Their structural characteristics were first identified from optical observations by Lieberman and Pierson [41] in the 1970s. 

Diamagnetic anisotropy Very weak Weak Strong 

3 Quantitative Control Parameters on the Basis of Fluid Mechanics Consideration 

Preforms placed in a reaction chamber are subject to gas flow and allow deposition. The gas flow patterns are governed by pressure and velocity and have a significant influence on the rate and quality of the deposit. It is essential to have a good understanding of the impact of gas flow patterns on a CVD process. This enables a suitable design solution to both preforms and gas channelling systems, 

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