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Evaporation, thermal contamination from

Vacuum Deposition. Vacuum deposition, sometimes called vacuum evaporation, is a PVD process in which the material is thermally vaporized from a source and reaches the substrate without coUision with gas molecules in the space between the source and substrate (1 3). The trajectory of the vaporized material is therefore line-of-sight. Typically, vacuum deposition takes place in the pressure range of 10 10 Pa (10 10 torr), depending on the level of contamination that can be tolerated in the resulting deposited film. Figure 3 depicts a simple vacuum deposition chamber using a resistively heated filament vaporization source. [Pg.514]

TerraTherm Environmental Services, Inc., a subsidiary of Shell Technology Ventures, Inc., has developed the in situ thermal desorption (ISTD) thermal blanket technology to treat or remove volatile and semivolatile contaminants from near-surface soils and pavements. The contaminant removal is accomplished by heating the soil in sim (without excavation) to desorb and treat contaminants. In addition to evaporation and volatilization, contaminants are removed by several mechanisms, including steam distillation, pyrolysis, oxidation, and other chemical reactions. Vaporized contaminants are drawn to the surface by vacuum, collected beneath an impermeable sheet, and routed to a vapor treatment system where contaminants are thermally oxidized or adsorbed. [Pg.1042]

Zinc Costing of Ca.pa.citors, In the zinc coating of paper strip for capacitors, the paper strip is fed from air through locks into a vacuum environment. There, it is coated by thermally evaporated zinc. The rate of evaporation is so high that contamination of the zinc vapor is excluded. The paper is fed at the maximum rate permitted by its own strength. [Pg.367]

The low-temperature thermal treatment (LT3) uses thermal desorption to volatilize organic compounds under noncombustion conditions. The contaminants are evaporated from excavated soil... [Pg.935]

Water has several attractive features as a solvent and, as we have said elsewhere, the best solvent is no solvent, but if one has to use a solvent then let it be water. Water is the most abundant molecule on the planet and is, hence, readily available and inexpensive. It is nonflammable and incombustible and odorless and colorless (making contamination easy to spot). It has a high thermal conductivity, heat capacity and heat of evaporation, which means that exothermic reactions can be controlled effectively. It readily separates from organic solvents owing to its polarity, density and because of the hydrophobic effect [12], which makes it eminently suitable for biphasic catalysis. Indeed, water forms biphasic systems with many organic solvents, with fluorous solvents, some ionic liquids and with scC02 [13]. [Pg.300]


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Thermal evaporator

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