Electron diffraction energy-loss

These specimens were then examined in a JEOL 200 CX electron microscope equipped with an environmental cell and heating stage, which allowed specimens to be heated in 1 Torr hydrogen up to 1100 K under these conditions the spatial resolution was 0.8 nm. In situ chemical analysis of the reacting specimen could be obtained using electron diffraction, energy-dispersive X-ray analysis, and electron energy loss spectroscopy. 

As the electron beam passes through the specimen, various interactions occur next to diffraction characteristic X rays are produced, the electrons suffer energy losses, etc. These effects can be u.sed for analytical applications (see Section 29.2.2.12). 

Electrons Electron microprobe (EMP) Scanning electron microscopy X-ray detection (XSEM) Auger electron spectroscopy (AES) Scanning electron microscopy (SEM) Low-energy electron diffraction (LEED) Electron-impact energy loss spectroscopy (EELS) Electron-stimulated desorption (BSD)... 

Electrons interact with solid surfaces by elastic and inelastic scattering, and these interactions are employed in electron spectroscopy. For example, electrons that elastically scatter will diffract from a single-crystal lattice. The diffraction pattern can be used as a means of stnictural detenuination, as in FEED. Electrons scatter inelastically by inducing electronic and vibrational excitations in the surface region. These losses fonu the basis of electron energy loss spectroscopy (EELS). An incident electron can also knock out an iimer-shell, or core, electron from an atom in the solid that will, in turn, initiate an Auger process. Electrons can also be used to induce stimulated desorption, as described in section Al.7.5.6. 

As the table shows, a host of other teclmiques have contributed a dozen or fewer results each. It is seen that diffraction teclmiques have been very prominent in the field the major diffraction methods have been LEED, PD, SEXAFS, XSW, XRD, while others have contributed less, such as NEXAFS, RHEED, low-energy position diffraction (LEPD), high-resolution electron energy loss spectroscopy (HREELS), medium-energy electron diffraction (MEED), Auger electron diffraction (AED), SEELFS, TED and atom diffraction (AD). 

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