Effects of Surface Conditions on Diamond Nucleation

In an effort to enhance diamond nucleation and to control film morphology, extensive work on the nucleation and early growth stages has been performed. As a result, technology problems associated with the nucleation of polycrystalline diamond films have been adequately addressed. A number of nucleation enhancement methods have been developed that enable the control of nucleation density over several orders of magnitude. Nucleation density has been increased from < 10 cm on untreated substrates up to 10 cm on scratched or biased substrates. The effects of surface conditions on nucleation processes have been investigated to provide the guideline for the selection of optimum surface pretreatment methods. In this chapter, substrate materials, surface pretreatment methods and their influences on diamond nucleation are discussed. 

Classical nucleation theory may be not well suited to describe the nucleation kinetics of diamond in CVD, since the critical nucleus size under the typical CVD conditions may be on the order of a few atoms. The surface energy contribution may cause a reverse effect on the phase stability and the GFobs free-energy of the formation of a critical nucleus may be negative, a case referred to as nonclassical nucleation. In such a case, atomistic theory should be employed as the starting point of theoretical analyses. 

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