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Effects of Physical Parameters in AMT Glow Discharge

Due to physical confinement, the relationship between the gap distance and the CDST becomes an important factor when large substrate surfaces are to be treated via the AMT technique. When Ar plasma was used to treat a TMS plasma polymer-coated CRS panel dark blue in color, the resulting multicolored [Pg.371]

Therefore, whether or not materials removed by sputtering redeposit on the substrate (cathode) surface depends on the relationship between the gap distance and the CDST e2. If the gap distance is equal to or greater than the CDST e2, materials removed by sputtering will not be redeposited on the substrate surface. Otherwise, [Pg.372]

When argon gas was used to sputter a colored CRS panel at different electrode distances using the AMT plasma technique, the multicolored profile shown [Pg.373]

INFLUENCE OF VARIOUS PARAMETERS ON THE COST IN AMT GLOW DISCHARGE [Pg.374]


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