Display capacitive coupling

By combining this technique with capacitive coupling or ultrasound reflection, wafer thickness and wafer flatness information is also obtained. A further step is to wafer-map the data. Using optical scanning, surface defect maps are generated (2.) and insulator thickness variations are measured ellipsometrically and displayed. As discussed further on, recombination lifetime maps can also be generated by non-contacting methods. 

Table 1 shows the result for capacitance and leakage current for SOG/SiNx, SOP/SiNx, and single SiNx layers. Both SOG/SiNx and SOP/SiNx are acceptable as planarization and insulation layer in the viewpoint of the insulation and capacitive coupling characteristics. For large display, the unit capacitance of less than 2 nF/cm was suggested. 

The template carbons demonstrate interesting performance in electric double layer capacitors [109], especially the mesoporous carbons prepared using MgO as the template [105,110], Asymmetric electric double layer capacitors constructed from these mesoporous carbons coupled with amicroporous activated carbon display high capacitance and high rate performance [111]. 

The total impedance complex plane plot for indirect hydrogen absorption without hydrogen evolution, including solution resistance and double-layer capacitance, is displayed in Eig. 7.9. It shows two semicircles due to the — Cdi and / ab Cp coupling followed by the finite-length reflective linear diffusion displaying a line at 45° followed by a capacitive line at 90°. 

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