Discussion of Data for Specific Processes and Species

Generally, when one is constructing a cross-section set, one finds it necessary to make use of swarm results at low energies and measurements and theory at intermediate and high energies because the swarm-derived cross sections become more uncertain as inelastic channels open up. 

Cross-Section Sets Available for Various Atoms and Molecules 

C2F6 Hayashi and Niwa (1987) Christophorou and Olthoff (1998a)  

Dissociation, attachment, and ionization are among the most important inelastic electron collision processes that one needs to be able to treat in plasma chemistry modeling. The dissociation cross section is very difficult to measure directly but 

Perhaps the first comprehensive set of measurements, which is still widely used, of the ionization cross sections for a large number of gases, 

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