Direct irradiation general considerations

The use of radiation to modify the physical properties of polymers has become a very important industry with products such as electrical cables with insulation capable of withstanding high temperatures and heat-shrinkable polyethylene. However, of direct relevance to this symposium was the recognition in the early 1970 s that electron beam irradiation of pol3mier films could provide an important lithographic tool for the manufacture of microelectronic components. For consideration of the general principles of these processes see, for example, references (66) and (67). The products required In this field are complex requiring both microscopic... 

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