Dielectric materials block copolymers

Fig. 3 Schematic representation of the self-assembly of block copolymers to give porous dielectric materials. (From Refill].)...

In this review, nanoporous dielectric materials have been presented. The preparation techniques, methods of pore generation, and materials classification were discussed. Inorganic, organic, and hybrid films were also discussed. The nanoporous dielectric films were classified by preparation method, which includes block copolymer, solvent as porogen approach, surfactant templating, and sol-gel approach. This is still a very active field of research because no one film has satisfied all the stringent requirements in semiconductor device processing. 

In 1991, we reported on the alignment of a lamellar microstructure in a block copolymer melt [63]. The material of this study was a symmetric polystyrene-poly(methyl methacrylate) diblock copolymer (PS-PMMA) of molecular weight 37,000. This copolymer was chosen because of the relatively strong dielectric contrast between the two blocks (cp = 2.55, = 3.78) and the relatively small... 

---