GDOES depth profile

Escobar Gahndo, R., Gago, R., Duday, D., Palacio, C. (2010) Towards nanometric resolution in multilayer depth profiling a comparative study of RBS, SIMS, XPS and GDOES comparative study. Anal Bioanal. Chem., 396, 2725-2740. 

FIGURE 10-20 RF-GDOES depth profile of a microelectronic multilayer system. Note the thickness and composition of each layer shown above each peak or band and the elemental composition indicated by the curves. (From N. Jakubowski, A. Bogaerts, and V. Hoffmann, Atomic Spectroscopy in Elemental Ar alysis, M. Cullen, ed., p. 129, Boca Raton, FL CRC Press, 2004. With permission.)... 

Figure 4.19 Comparison of oxide thicknesses calculated from the model open symbols) and estimated from GDOES depth profiles closed symbols) on PM2000 and MA956 (left) and Alloy 690 and Sanicro 28 (right) at 650°C in SCW [75,88].

In special cases GDOES can operate at much lower erosion rates and then becomes a surface depth profiling technique with the same depth sensitivity as. for instance, AES (108j. However, the effectiveness of GDOES lies in its high-sputter-rate mode. Other emission spectroscopies from surfaces are available, such as spark or la.ser ablation spectro.scopies, but they are less well adapted to quantitative depth protlling than GDOES. 

Figure 12. Quantified GDOES depth profiles from three hot-dip zinc-coated steel samples [100],...

Quick depth profile, quantitative GDOES can be used. 

Quantitative depth profile analysis AES, XPS, GDOES and SNMS... 

Below the scale, Cr-rich carbides have formed and their density and penetration depth increase with time and temperature. GDOES profiles of T91 (9Cr steel grade) surface after exposure in S-CO2 for 1000 h at 400°C and 550°C (Fig. 3.18) revealed strong carbon transfer to the inner oxide scale and substrate at 550°C but almost none to the substrate at 400°C. 

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