Cycloolefins commercial polymers

Commercially available polymers, produced from cycloolefins by ring-retaining polymerisation and ring-opening metathesis polymerisation of cycloolefins, and their typical uses are listed in Table 6.1 [12,14,144-147, 150,167-171,177-186],... 

The history of the development and chemistry of various resist polymer platforms of ArL resist materials has been reviewed in detail elsewhere,as well as in Chapter 7. Here, we briefly summarize the main attributes of each platform with a view to relating aspects of their physical and chemical properties to lithographic and etch performance. Figure 13.39 shows the three main polymer platforms [acrylate, cycloolefin (CO), and cycloolefin-maleic anhydride (COMA)] on which most of the commercially available ArF resists today are based. 

The high oxophilicity of early transition metal catalysts (titanium, zirconium, or chromium) causes them to be poisoned by most functionalized olefins, particularly the commercially available polar comonomers. However, there are examples of copolymerizations with special substrates or with very high levels of a Lewis acid incorporated into the polymerization system to protect the polar functionality through complexation. " Alternative routes to polar copolymers involving metathesis of cyclic olefins and functionalization of the resulting unsaturated polymer or metathesis of polar cycloolefins followed by hydrogenation to remove the resulting unsaturation have been published.The cost of these multistep... 

There is a large amount of literature and many patents in this area, as well as many good reviews and books [8,9,10,11,12,13,14,15,16,17,18,19]. The recent review by Coates [10] describing stereoselective polymerization overlaps considerably with this chapter, and is recommended for consultation. In this chapter, metallocene-catalyzed olefin polymerization is discussed, focusing on the synthesis of stereoregulated polymers. The aim of this review is not to be a complete survey the outline and some recent topics in polymerization of propylene, higher a-olefins, styrene, acrylate esters such as methyl methacrylate (MMA), 1,3-butadienes, and cycloolefins will be described. Polyethylene is one of the most important commercially manufactured polymers. The homopolymer, as well as the copolymer with ethylene and other olefins, is an important subject in the polyolefin industry. However, it will be only briefly mentioned because the stereochemistry is less involved. 

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