CVD of TBCCO

CVD growth of TBCCO thin films was first reported by Marks et al. [271] at Northwestern University, and Erbil et al. [272] at Georgia Institute of Technology, who deposited on single-crystal YSZ and sapphire substrates, respectively. Marks et al. 

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CVD of TBCCO Thin Films on Single Crystal Substrates.121... 

Table 2-8. Experimental conditions for and superconducting properties of TBCCO thin films grown by CVD. 

Researchers at Advanced Technology Materials (ATM) and Los Alamos National Laboratory (LANL) have focused on the CVD synthesis of Tl-2212 thin films on MgO substrates [277]. Fluorinated MOCVD precursors were used to grow Ba-Ca-Cu-O (F) thin films which were then annealed in the presence of H2O/O2 to promote fluoride evolution. The films were placed face down between two TBCCO pellets and annealed. The resultant superconducting films exhibited average electrical properties with Tc = 108 K and 7. = 1 x in Acm at 90 K. 

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