Cumulative LPC

Slurry/Challenge Solution Planargard CS05 (cumulative % LPC Reduction for Particles >0.56 pm) Pressure Drop Ap (psi) 1-1/2" Length Filter Media Flow Rate (ml/min)... 

The cumulative LPC is a more sensitive measure of the defect-causing large-particle growth than the PSD measurement. Such large particles could cause scratches on the wafers and issues with the tighter retention of the slurry,... 

It is important to note that present AccuSizer measurements were obtained with a particle-size threshold of 0.56 pm (the lowest possible size threshold available for this analyzer) and any LPC growth behavior for particles smaller than 0.56 pm could not be seen in these data. MLC pump extensive handling showed a slight increase in mean particle size and PSD of silica-H slurry, as will be discussed later. The above behavior of LPC may be attributed to the cumulative effects of low-intensity continuous shear application to the bulk volume of slurry handled at very high pump speeds in MLC pump. In Fig. 18.21b, the LPC trend for the complete 330 h of Test 1 is very similar to the first 45 h. 

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