Cryopumping Region

For the production of pressures in the ultrahigh vacuum region, sputter-ion, and sublimation pumps, as well as turbomolecular pumps and cryopumps, are used in combination with suitable forepumps. The pump best suited to a particular UHV process depends on various conditions (for further details, see Section 2.5). 

In the case of the exhaust plume tests, the exhaust gas must be allowed to fully expand throughout the pertinent region of interest. This test requirement places some unusual demands upon the facility s vacuum pumping system. The requirements for the pumping of a directional free-molecule flow will be discussed in this paper, and a cryopump design technique will be presented which satisfies the exhaust plume test objectives. 

YAG laser. Helium typically flows into the cell at 1 x 10 to 8 x 10 atom/sec. Despite the large He gas flow, the vacuum in the beam region is maintained at a low 3x10 torr by two stages of differential pumping with high speed cryopumps made of activated charcoal. 

The wet disks are immediately immersed into the vapor of refluxing isopropanol. Once they reach the reflux temperature, as noted by a reduction in the rate of alcohol condensation on the disks, they are removed into the room air where they rapidly become dry and slowly cool to room temperature. At this point, the disks are individually weighed to the nearest 0.1 mg. The disks are then loaded into a metal tray with large circular regions on their bottom faces exposed and the tray placed in the load lock of a vacuum chamber. The load lock is pumped to about 10 torr and then the tray is translated into the chamber and the load lock sealed off from the chamber. The chamber is pumped to about 10 torr with a cryopump. The major residual gas is water from the rotatable rubber seal used between the evacuated space in the chamber and the water flow path into and out of the rotatable copper crucible mentioned below. Titanium vapor is sublimed from a Ti ingot by bombardment with about 8 keV electrons while the periphery of the ingot is cooled by sparse physical contacts with the water-cooled copper crucible in which it rests. The Ti vapor condenses in the line of sight from the source onto the exposed bottoms of the disks. The thickness of the deposited titanium, is monitored by a calibrated quartz crystal balance close to the quartz disks. Typically (iji 5 x 10 cm. 

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