Conduction mechanism semiconducting metal oxide sensing

Conduction mechanism in semiconducting metal oxide sensing films impact on transduction... 

Compact chemical sensors can be broadly classified as being based on electronic or optical readout mechanisms [28]. The electronic sensor types would include resistive, capacitive, surface acoustic wave (SAW), electrochemical, and mass (e.g., quartz crystal microbalance (QCM) and microelectromechanical systems (MEMSs)). Chemical specificity of most sensors relies critically on the materials designed either as part of the sensor readout itself (e.g., semiconducting metal oxides, nanoparticle films, or polymers in resistive sensors) or on a chemically sensitive coating (e.g., polymers used in MEMS, QCM, and SAW sensors). This review will focus on the mechanism of sensing in conductivity based chemical sensors that contain a semiconducting thin film of a phthalocyanine or metal phthalocyanine sensing layer. 

Key words semiconducting metal oxide (SMOX), sensing and transduction of SMOXs, p- and n-type MOXs, conduction mechanism, modelling, measurements taken in working conditions. 

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