Computer-controlled scanning electron results

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The Physical Electronics 680 Nanoprobe employs a field emission electron gun, and this results in a spatial resolution of less than lOnm. Ion bombardment for depth profiling is available in the SAM, and both the electron beam and the ion beam are computer controlled so that depth profiles can be run automatically, and maps and line scan of Auger electron distributions can be generated. 

The particle size distribution of powders in the range 0.2-0.5 pm can be determined by automated electron probe microanalysis, as developed for particle characterization work at the University of Antwerp (see e.g. Ref. [202]). Here the exciting electron beam of a microprobe scans a deposit of the aerosol particles collected on a Nuclepore filter under computer control, and from the detection of element specific x-ray fluorescence signals, the diameters of a large number of particles are determined automatically. As shown by results for AI2O3, the particle size distributions determined by automated electron probe microanalysis agree to a first approximation with those of stray laser radiation (Fig. 62) [203], Deviations, however,... 

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