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Clean surfaces multilayer contamination

Table 14.4 Multilayer Paint Systems for New Clean Surfaces, Free of Chemical Contamination... Table 14.4 Multilayer Paint Systems for New Clean Surfaces, Free of Chemical Contamination...
Thermal processes used in EUV optics contamination mitigation are processes in which heat is used to either inhibit or clean off contaminants, without introducing a new set of problems. Taking a Ru-capped EUV multilayer reflector as our target surface, we examine here aspects of the surface reactions involved in removing carbon deposits and surface oxides from model Ru and Ru02 surfaces. [Pg.731]

Furthermore, Hill et al. reported that mitigation of Ru-capped multilayers by carbon-containing species may result from water-induced desorption and/or displacement of carbon compounds from the exposure chamber and other surfaces therein. Atomic hydrogen has been reported to be elfective in cleaning Sn as well as carbon contaminants from EUV mirrors. ... [Pg.736]

Table 14.3 Multilayer Paint Systems Requiring Surface to Be Clean, Dry, and Free of Loose Dirt, Oil, and Chemical Contamination... Table 14.3 Multilayer Paint Systems Requiring Surface to Be Clean, Dry, and Free of Loose Dirt, Oil, and Chemical Contamination...
See other pages where Clean surfaces multilayer contamination is mentioned: [Pg.39]    [Pg.590]    [Pg.140]    [Pg.43]    [Pg.46]    [Pg.16]    [Pg.720]    [Pg.734]    [Pg.43]    [Pg.183]    [Pg.578]    [Pg.240]   
See also in sourсe #XX -- [ Pg.50 , Pg.140 ]



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