Chemically sensitive microelectrochemical devices

Not long ago,this group first described microelectrochemical devices, which are based on microfabricated arrays of electrodes, connected by electroactive materials. Because the active components of these devices are chemical in nature, many of these devices are chemically sensitive,and comprise a potentially useful class of chemical sensors. Devices showing sensitivity to pH, 02r 2 f and Na" have been demonstrated. These devices are, typically, operated in fluid solution electrolytes. If this class of devices is to be useful as gas sensors, systems which are not dependent on liquid electrolytes need to be developed. We have recently reported solid state microelectrochemical transistors, which replace conventional liquid electrolytes with polymer electrolytes based on polyethyleneoxide (PEG) and polyvinylalcohol (PVA). In this report, we discuss additional progress toward solid-state devices by employing a new polymer ion conductor based on the polyphosphazene comb-polymer, MEEP (shown below). By taking advantage of polymer ion conductors we have developed microelectrochemical devices, where all of the components of the device are confined to a chip. 

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