Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Chemical vapor deposition cyclopentadienyl compounds

Cyclopentadienyl compounds have been thoroughly investigated as suitable precursors to rare earth doped semiconductors in MOCVD (metal-organic chemical vapor deposition) or MOVPE (metal-organic vapor phase epitaxy) processes [283]. The use of btsa complexes for the same purpose has appeared in the literature very recently [285]. Typical process conditions are shown in Scheme 14. It was found that the carbon contamination of the deposited metal is less in the btsa case. [Pg.93]

See other pages where Chemical vapor deposition cyclopentadienyl compounds is mentioned: [Pg.68]    [Pg.93]    [Pg.2135]    [Pg.192]   
See also in sourсe #XX -- [ Pg.311 ]

See also in sourсe #XX -- [ Pg.311 ]



SEARCH



Chemical Compounding

Chemical compounds

Chemical vapor deposition

Cyclopentadienyl compounds

© 2024 chempedia.info