Transport charged species, plasma processes

The experimental aspects of neutral plasma gas-phase chemistry are very similar to those discussed above in conjunction with MOVPE. The development of in situ diagnostics and kinetic studies are needed to unravel the complex free radical-dominated gas-phase chemistry. The unique aspects of plasma processing stem from the transport and reactions of charged species. Besides providing insight into the underlying fundamentals, tech-... 

Plasma sheaths are thin regions present in every gaseous discharge perpendicular to the surface of a solid in contact with a plasma and have a net electrical charge, usually positive, surrounding the body. Plasma sheaths are important from the viewpoint of materials treatment since they control the transport process of the chemically activated species generated in the plasma towards the surface of the substrate, as well as the bombardment with positive ions of that surface and the chemical reactivity of surface induced by it. 

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