Ceramic interconnects volatilization

Figures 9.1-9.3 illustrate these interconnected relationships.13 Figure 9.1 defines some of the terms used in this chapter. Small molecules are species with molecular weights below about 1,000. They are volatile at temperatures below say 200 100 °C. Clusters are oligomers derived from covalently linked small molecules. They have a lower volatility than small molecules and, if large enough, can be shaped by melting or by solvent evaporation methods. Linear polymers can be simple chain structures or may consist of rings linked together. In either case they are usually non-volatile and easily fabricated. Cross-linked systems can be produced from polymers or from clusters. The final ceramic may be amorphous or crystalline.

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