Ceramic binding energy

The copyrolysis of 1 wt% dibromotetrafluoro-p-xylylene with commercially available hexafluoro-p-xylene (Aldrich) with metals was examined and it was found that it was indeed possible to prepare films that were spectroscopically indistinguishable from those deposited from dimer. The PA-F films obtained are of excellent quality, having dielectric constants of2.2-2.3 at 1 MHz and dissociation temperatures up to 530°C in N2. A uniformity of better than 10% can be routinely achieved with a 0.5-gm-thick film on a 5-in. silicon wafer with no measurable impurities as determined by XPS. During a typical deposition, the precursor was maintained at 50°C, the reaction zone (a ceramic tube packed with Cu or Ni) was kept at 375-550°C, and the substrate was cooled to -10 to -20°C. The deposited film had an atomic composition, C F 0 = 66 33 1 3 as determined by XPS. Except for 0, no impurities were detected. Within instrumental error, the film is stoichiometric. Poly(tetrafluoro-p-xylylene) has a theoretical composition ofC F = 2 1. Figure 18.2 illustrates the XPS ofthe binding energy... 

Fig. 4.15. Binding energy difference between Zn2p3/2 and O Is core levels and between the core levels and the valence band maximum. Films are deposited by dc magnetron sputtering from undoped and 2 % Al-doped ceramic targets at room temperature in dependence of sputter gas composition (left) and in pure Ar in dependence on substrate temperature (right). All films were deposited using a total pressure of 0.5 Pa, a sputter power density of 0.74 W cm-2 and a substrate to target distance of 10 cm...

Although the discussion on the broken bond model has been mainly focused on pure metallic surfaces, the extension can be easily made simply by replacing the binding energy term Ej, in Eq. (1) with the interaction energies among different atoms in the case of metallic alloys [15-17]. However, in the case of ceramic materials the... 

---