Catalytic etching definition

Catalytic etching, 41 359, 383-384 definition, 41 360-361 in low earth orbit, 41 414—415 models, 41 359, 360-362 plasma etching, 41 407-414 thermally generated free radicals, 41 406-407... 

The above definitions are somewhat different from those given in earlier publications. In earlier studies, thermal etching has been defined to be etching that takes place in nonreactive or mildly reactive gases or under vacuum. Catalytic etching has been defined to be any etching process that takes place in... 

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