Carbon MEMS

Three-dimensional electrode arrays have been fabricated using two very different micromachining methods. One approach, named carbon MEMS or C-MEMS, is based on the pyrolysis of photoresists. The use of photoresist as the precursor material is a key consideration, since photolithography can be used to pattern these materials into appropriate structures. The second approach involves the micromachining of silicon molds that are then filled with electrode material. Construction of both anode and cathode electrode arrays has been demonstrated using these microfabrication methods. 

Thernard, L. J., and Biot, J. B. Memoire sur I analyse comparee de I arragonite et du carbonate de chaux rhomboidal. [On the comparative analyses of aragonite and rhombohedral calcium carbonate. ] Mem. Phys. II. Soc. d Arcueil 2, 176-206 (1809). 

Sullivan JP, Friedman TA, Hjor K (2001) Diamond and Amorphous Carbon MEMS. MRS bull. 26 309-311. 

It is believed that carbon membrane gas separation teelmologies will break through the limitation and weakness of conventional membranes. Carbon mem-... 

The bicyclic compound decahydronaphthalene, or bicyclo[4.4.0]decane, has two fused six-mem-bered rings. It exists in cis and trans forms (see Fig. 1.10), as determined by the configurations at the bridgehead carbon atoms. Both cis- and rran -decahydronaphthaiene can be constructed with two chair conformations. 

Bis(tnfluoromethyl)-subsntuted hetero-1,3-dienes and acetylenes react to give open-chain tnfluoromethyl-substituted N-propargylic amides, 4//-1.3 oxazines, and 2-oxazohnes [42,144] The formation of 2-oxazolmes is an example of pathway 2 (equabon 25), where only one carbon atom of the acetylene moiety IS incorporated into the new nng system The selectivity of this reaction can be controlled efficiently in favor of the five-membered nng system by altering the reaction conditions In the presence of 4-dimethylaminopyndine, the five-mem-... 

The l-rcrt-butyl derivative 9 can be obtained in an optically active form even though the compound contains no asymmetric carbon atom. The chirality is due to the nonplanarity of the seven-mem be red ring, which is conformationally stable.191... 

Dimigen, H., Hubsch, H., and Memming, R., "Tribological and Elecbical Properties of Metal-containing Hydrogenated Carbon Films," Appl. Phys. Lett., Vol. 36, 1987, pp. 1056-1058. 

Intramolecular Michael addition.1 Cesium carbonate catalyzes the intramolecular Michael addition of a cyclic (3-keto ester to an a,(3-ynone to form a cyclic enone after protonation. This reaction proceeds readily when a five- or six-mem-bered ring is formed higher rings can be formed, but in low yield.1... 

Joshi PP, Merchant SA, Wang YD, Schmidtke DW (2005). MEMS sensor material based on polypyrrole-carbon nanotube nanocomposite film deposition and characterization. J. Micromech. Microengin. 5 2019-2027. 

Figure 22. Array of carbon electrodes prepared by tbe C-MEMS process. The aspect ratio is approximately 20 1. (Courtesy of Prof. Marc Madou, University of California— Irvine.)...

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