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C nano-thin film

A random network of covalently bonded carbon in sp, sp, or sp local coordination with other carbon atoms or impurity dopants gives rise to a-C thin films that can be [Pg.318]

Complementary electronic properties of a-C/diamond thin nanofilm can be obtained using conductive a-C nanofilm and perfectly nonconducting diamond substrate. Diamond/a-C nanofilms for conductive temperature and chemically sensing can be synthesized by annealing at temperature above 1000 °C in vacuum or inert gas atmosphere, followed by plasma etching as the chemical sensitivity of the nanofilm to be further controlled by plasma treatment (Kumar et al., 2011). However, the nanofilm increases in amorphousity after plasma etching. [Pg.319]


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