Bubbler configurations

The bubbler configuration depends on how much scrubbing is needed for a given system to remove contaminants. Bubbler designs vary and I have noted at least ten different designs used by chemists. 

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In some cases, the metal-organic is a solid which sublimates. In this case mass transport can be much more difficult to calculate. Several works have examined sublimation and diffusion sources to calculate mass transport. Specific problems are that gas passing over a solid bed does not necessarily yield maximum transport efficiency or gases passing through a solid tend to channel (develop preferential flow paths through the material), and flux varies in time. To minimize this problem, first the internal bubbler configuration may be modified in order to maximize the surface area. Secondly, bub-... 

InP is another popular optoelectronic III-V alloy demonstrating high mobilities (> 200000 crn /Vs at 77 K, > 5 000 at room temperature). InP substrates are available in 50 and 75 mm diameters, and larger diameters are being pursued. Typical source reactants are PHj and TMIn. The problems have been in stable transport of reactant materials and film purity. Both problems have been addressed purity has been greatly improved over the past several years, the bubbler internal geometry has been improved, and In sources have been configured to operate both in parallel or in series. 

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